In total, five reactors are available, four of them belongs to F-120 and they are termed as MC, M, F and DJ reactors. The last one is R-100 reactor from Picosun. In general, F-reactors are flow type reactors F-reactors are very versatile as compared to R-reactors as any sorts of reactants can be easily tried in F-reactor. R-reactor is more suitable for quality ALD solutions.
| ALD Reactor DJ |
| Capacity: 1 persons |
Status: Available |
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
|
| ALD Reactor F |
| Capacity: 1 persons |
Status: Available |
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
|
| ALD Reactor M |
| Capacity: 1 persons |
Status: Available |
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
|
| ALD Reactor MC |
| Capacity: 1 persons |
Status: Available |
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
|
| ALD Reactor R |
| Capacity: 1 persons |
Status: Available |
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
|