In total, five reactors are available, four of them belongs to F-120 and they are termed as MC, M, F and DJ reactors. The last one is R-100 reactor from Picosun. In general, F-reactors are flow type reactors F-reactors are very versatile as compared to R-reactors as any sorts of reactants can be easily tried in F-reactor. R-reactor is more suitable for quality ALD solutions.
| ALD Reactor DJ |
| Capacity: 1 persons |
Status: Available |
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| ALD Reactor F |
| Capacity: 1 persons |
Status: Available |
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| ALD Reactor M |
| Capacity: 1 persons |
Status: Available |
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| ALD Reactor MC |
| Capacity: 1 persons |
Status: Available |
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| ALD Reactor R |
| Capacity: 1 persons |
Status: Available |
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