In total, five reactors are available, four of them belongs to F-120 and they are termed as MC, M, F and DJ reactors. The last one is R-100 reactor from Picosun. In general, F-reactors are flow type reactors F-reactors are very versatile as compared to R-reactors as any sorts of reactants can be easily tried in F-reactor. R-reactor is more suitable for quality ALD solutions.
| ALD Reactor DJ |
| Capacity: 1 persons |
Status: Available |
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| ALD Reactor F |
| Capacity: 1 persons |
Status: Available |
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| ALD Reactor M |
| Capacity: 1 persons |
Status: Available |
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| ALD Reactor MC |
| Capacity: 1 persons |
Status: Available |
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| ALD Reactor R |
| Capacity: 1 persons |
Status: Available |
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