In total, five reactors are available, four of them belongs to F-120 and they are termed as MC, M, F and DJ reactors. The last one is R-100 reactor from Picosun. In general, F-reactors are flow type reactors F-reactors are very versatile as compared to R-reactors as any sorts of reactants can be easily tried in F-reactor. R-reactor is more suitable for quality ALD solutions.
| ALD Reactor DJ |
| Capacity: 1 persons |
Status: Available |
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
|
| ALD Reactor F |
| Capacity: 1 persons |
Status: Available |
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
|
| ALD Reactor M |
| Capacity: 1 persons |
Status: Available |
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
|
| ALD Reactor MC |
| Capacity: 1 persons |
Status: Available |
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
|
| ALD Reactor R |
| Capacity: 1 persons |
Status: Available |
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
|