| Ion accelerating voltage |
2 to 8kV |
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| Ion beam width |
500 μm (full width at half maximum) |
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| Milling speed |
500 μm/h
(The average value over 2 hours, at accelerating voltage: 8 kV, specimen: Si, 100 μm from edge) |
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| Specimen holder ultimate cooling temperature |
-120°C or less |
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| Specimen cooling hold time |
8 Hours or more |
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| Coolant tank capacity |
Approximately 1 L |
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| Maximum specimen size |
Dimensions: 11mm(W)×8mm(D)×3mm(H) |
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| Stage movement range |
X-axis;±6mm, Y-axis; ±2.5mm |
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| Specimen fixing method |
Clipping |
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| Specimen milling swing angle |
±30°(Patent US4557130) |
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| Monitoring camera magnification |
Approximately ×20 to 100 (6.5-inch display) |
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| Air-isolation system |
Transfer vessel |
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| Air-isolation method |
Set the inside of the chamber to a gas environment, cover the transfer vessel with a cap, and encapsulate the specimen into the vessel. |
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| Operation |
Touch panel, 6.5-inch display |
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| Gas |
Argon gas (flow rate controlled by mass-flow controller) |
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| Pressure gauge |
Penning vacuum gauge |
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| Main evacuation pump |
Turbo molecular pump |
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| Auxiliary evacuation pump |
Rotary pump |
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