A specimen is loaded through a load lock system to the main chamber, that operates at high vacuum by a turbo molecular pump (imaging below 1e-3 mbar). The thermal FEG emitter lies above in an ultra-high vacuum column, together with the lensing system. The emitter provides stable but large currents up to 100 nA for quick lithography. Highest resolution is achieved with the smallest probe current in the order of 10 pA.
   Electron acceleration voltages range from 1 to 30 kV.
   The working distances are from 10 to 40 mm and possible magnifications from 10 to 1 000 000. The specimen holder system supports tilt of the sample up to 70 degrees.