Multiprobe manual probestation which combined with optical microscope connected to PC and aimed for probing small geometries, probing bonding pads and larger geometries. Different measurement devices (generators, voltmeters, resistance bridges) avaliable for customizing measurement configuration.

• Equiped with XYZ 300 TR micropositioner with test arm holder, testing arm, needle and magnetic base.
• Vacuum chamber with dry pump. Minimum pressure 0.05 mBar.
• Microscope with videocamera connected to PC.
• Measurement equipment:
  - AVS-47 Resistance bridge
  - Agilent 34401 Digital multimeter
  - Fluke 8846A Digital multimeter
  - HP 3478 multimeter
  - EG&G Instruments 7260 DSP Lock-In amplifier
  - Teklab FG-52 function generator