NanoETCH System for 2D materials Research and Development
Chamber
All SS-304 construction. Vertical cylindrical chamber with Viton O-ring seals. ISO63 pumping port with integrated throttle valve. Hinged top-plate and chamber baseplate with various NW40CF and 1" bolt ports for integrating in-chamber hardware (see below) and for enhanced flexibility with respect to future system upgrades.
Pumping Group
Edwards EXT75DX water-cooled turbomolecular vacuum pump, vent valve, SS-304 KF16 backing line to Edwards nXDS6i dry scroll pump.Edwards wide-range gauge for pressure measurement.
- Base Pressure: 5E10-7 mbar
- Safety Interlocks: Water, low-vacuum, high-vacuum.
Gas admission
Two mass-flow controllers (MFCs) for admission of Ar, O2. MFCs are connected to the main chamber via a stainless-steel manifold and pipework and an appropriate gas admission feedthrough. Gas admission can be operated in flow or pressure-control mode (see below).
High-resolution Pressure control
Automatic pressure control via PID feedback loop operated in response to high-resolution chamber pressure measurements from a high-accuracy 0.1 Torr full scale capacitance manometer. To start, user enters a pressure setpoint. System software then automatically adjusts MFC flow rates (including to a fixed, user-defined ratio, if more than one MFC is being operated simultaneously) to achieve the desired chamber pressure. Pressure control resolution to 0.1 mTorr.
Etch stage
4” aluminium etch electrode housed in an isolated cup assembly. An HT insulator/feedthrough connects the RF via an N-type fitting. The device is not water cooled and is thus subject to maximum power/duration constraints.
RF power supply
Single channel 150 W RF power supply with integrated auto-match unit and full integration with PLC software suite. Note that output power is limited to 30 W in line with etch stage maximum capacity and typical application. User operation is via the touchscreen HMI, and control resolution is 1 W.
High-resolution RF power control
Upgrades and configures the RF PSU for control of power to 0.01 W resolution over PSU output full scale.
System control
High resolution colour touchscreen with purpose-designed software suite. System control via industry-grade PLC electronics. System has USB and/or ethernet connections for servicing/diagnostics and data-logging/download during use (PC/laptop with USB/ethernet connections required). Expandable and future proof.