Whitelight 3D surface profilometer.Non-contact 3-D surface metrology.

Max. Scan Range ≤10 mm

Vertical Resolution1 <0.01 nm

Laterla resolution: 0.01 - 0.38 µm (see attached data sheet).

Max Scan 47 μm/sec (with standard camera)

Max. Sample Slope ≤40° (shiny surfaces); ≤87° (rough surfaces)

Sample Height ≤100 mm (4 in.)

XY Sample Stage 150 mm (6 in.)manual or optional motorized stage.

Z Focusing: 100 mm manual or motorized option

Tip/Tilt Function ±6° manual in stage.