Phenom desktop SEM is imaging tool that combines an optical camera and a scanning electron microscope.

Installation: 2017

Resolution: 30 nm

Electron optical:

• Long lifetime thermionic source (CeB6)
• Magnification range: 70 – 20 000x, Digital zoom 12 x

Acceleration voltage: 5 kV

Intensity: medium beam current/spot size

Detector: 4-segmented back scattering detector operates in two modes

• Full
• Topographic A/topography orientated in the X direction, and topographic B/topography orientated in the Y direction

Holders:

• Standard holder
• Charge reduction holder